http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102231296-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate | 2019-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102231296-B1 |
| titleOfInvention | A organic-metal precirsor compound and othin film prepared by using the same |
| abstract | The organometallic precursor compound of the present invention and a method for producing an organometallic thin film using the same satisfy high volatility, excellent chemical and thermal stability, and have a significantly improved thin film deposition rate even at low temperatures. In addition, by providing an organometallic precursor compound that can be used to form a dielectric thin film in a semiconductor device, it is possible to prepare an organometallic and/or metal-containing thin film with improved characteristics deterioration due to by-products. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220158601-A |
| priorityDate | 2018-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.