http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102228505-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2017-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102228505-B1 |
| titleOfInvention | Surface defect inspection using large particle monitoring and laser power control |
| abstract | A method and system for reducing illumination intensity during scanning over large particles is presented herein. Surface inspection systems use a separate leading measurement spot to determine the presence of large particles in the inspection path of the primary measurement spot. The inspection system reduces the incident illumination power while large particles are within the main measurement point. The main measuring point and the leading measuring point are individually imaged on one or more detectors by a common imaging condensing objective. The imaging-based condensing design spatially separates the image of the leading measurement point from the image of the primary measurement point in one or more wafer image planes. The light detected from the leading measurement point is analyzed to determine a reduced power time interval at which the light output of the main illumination beam and the lead illumination beam is reduced. |
| priorityDate | 2016-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.