http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102212733-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2017-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102212733-B1 |
| titleOfInvention | Actinic ray-sensitive or radiation-sensitive composition, purification method of actinic-ray-sensitive or radiation-sensitive composition, pattern formation method, and method of manufacturing electronic device |
| abstract | An actinic ray-sensitive or radiation-sensitive composition capable of forming a pattern having excellent resolution and less residual defects, a method for purifying an actinic-ray-sensitive or radiation-sensitive composition, the actinic-ray-sensitive or radiation-sensitive composition A pattern formation method including a purification method of, and a method of manufacturing an electronic device are provided. The actinic-ray-sensitive or radiation-sensitive composition containing a metal cation and a ligand is an actinic-ray-sensitive or radiation-sensitive composition having a particle diameter of 0.15 μm or less in 1 mL of the composition and the number of particles in a liquid of 10 or less. |
| priorityDate | 2016-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 514.