| abstract |
Methods of cutting pins and structures formed thereby are described. In an embodiment, the structure includes a first pin on a substrate, a second pin on the substrate, and a pin cutting peel structure disposed between the first pin and the second pin. The first pin and the second pin are aligned in the longitudinal direction. The pin cut fill structure includes an insulating liner and a fill material on the insulating liner. The insulating liner is in contact with the first sidewall of the first fin and the second sidewall of the second fin. The insulating liner includes a material with a band gap greater than 5 eV. |