Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02658 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-528 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76822 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-682 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5328 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02439 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
filingDate |
2013-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2021-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2021-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-102205853-B1 |
titleOfInvention |
Non-lithographically patterned directed self assembly alignment promotion layers |
abstract |
A method of an aspect includes forming a directional self-assembly alignment promoting layer over a surface of a substrate having a first patterned region and a second patterned region. Optionally, a first directional self-assembly alignment promoting material is formed over the first patterned area without using lithographic patterning. The method also includes forming a layer assembled by directional self-assembly over the directional self-assembly alignment promoting layer. A plurality of assembled structures each comprising a polymer of a predominantly first type are formed over a first directional self-assembly alignment promoting material. The assembled structures are each adjacently surrounded by a second different type of polymer, mostly over the second patterned area. The first directional self-assembly alignment promoting material has a greater chemical affinity for the first type of polymer than for the second different type of polymer. |
priorityDate |
2013-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |