http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102201349-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 |
| filingDate | 2017-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102201349-B1 |
| titleOfInvention | First, a method for producing an electroplated copper layer having a growth orientation |
| abstract | The present invention comprises 120 to 200 g/l of copper sulfate, 50 to 150 g/l of sulfuric acid, 100 to 1,000 ppm of wetting agent, 5 to 50 ppm of brightener, 40 to 100 ppm of non-dye leveling agent and water. Provide electroplating amount; Providing a phosphorus copper anode comprising 0.03-150% by weight of phosphorus; And electroplating at a current density of 1-18 A/dm 2 ; And it relates to a method for producing an electroplated copper layer having a first growth orientation, comprising applying mechanical stirring to ensure a uniform concentration distribution of the electroplating solution and increasing mass transfer. |
| priorityDate | 2016-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.