http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102195151-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D161-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G8-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D161-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G14-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2013-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102195151-B1 |
| titleOfInvention | Composition for forming resist upper layer film for lithography and method for manufacturing semiconductor device using same |
| abstract | [Problem] Manufacturing of a semiconductor device capable of selectively transmitting only EUV by blocking exposure light, such as UV or DUV, and developing with a developer after exposure, without intermixing with the resist, especially during EUV exposure A resist upper layer film forming composition used in a lithography process in a step is provided. [Solution] There is provided a resist upper layer film-forming composition comprising a novolac-based polymer containing a hydroxy group having a structure of (Formula 1-1) and a solvent. (In (Formula 1-1), Ar 1 may contain a hydroxy group and is an organic group containing 1 to 3 benzene rings. Ar 2 represents a benzene ring, a naphthalene ring, or an anthracene ring. A hydroxy group is represented. Group and R 1 are substituents of the hydrogen atom of Ar 2 .) |
| priorityDate | 2012-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 621.