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filingDate 2019-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9279183d9686bfe5adae5a031637caa8
publicationDate 2020-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102194297-B1
titleOfInvention A composition of anti-reflective hardmask containing indole-fluorene polymer
abstract The present invention provides an antireflection hardmask composition comprising (a) a polymer in the form of indole-fluorene represented by the following formula (1) or a copolymer blend comprising the same, and (b) an organic solvent. [Formula 1]
priorityDate 2019-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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