http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102177208-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3429 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3452 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3417 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-352 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 2013-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102177208-B1 |
| titleOfInvention | sputtering system and the fabrication method using the same |
| abstract | Disclosed is a sputtering system and a method of manufacturing a display device using the sputtering system. The present invention relates to a chamber; and, a plurality of targets installed in the chamber and disposed to face each other; and a magnet unit respectively disposed inside a plurality of targets to form a magnetic field between the plurality of targets; and, sputtering at the target A substrate on which the formed particles are deposited; and a substrate holder for supporting the substrate, wherein one magnet unit is installed in one target, and two rows of magnets are disposed in one magnet unit, and a plurality of targets And, by configuring the loop of electrons in one target to be half (half), it is possible to minimize abnormal discharge such as asymmetric corrosion of the target, arc, and plasma density reduction. |
| priorityDate | 2013-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.