http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102173593-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-16 |
| filingDate | 2014-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102173593-B1 |
| titleOfInvention | Etching liquid composition and etching method |
| abstract | It is an object of the present invention to obtain a thin wire having a desired width in a batch etching of a laminated film including a titanium-based film and a copper-based film, and an etchant composition capable of obtaining a thin wire having a preferable cross-sectional shape, and using the same It is to provide an etching method. |
| priorityDate | 2013-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 89.