abstract |
Various vinyl addition polymers of nadic anhydride are disclosed. Examples of such polymers include copolymers and terpolymers of anhydride and a wide variety of norbornene-type monomers. Nadic anhydride polymer is useful for forming a photosensitive composition of both positive and negative, and the composition has a low dielectric constant and is capable of forming a thermally stable high-resolution image forming film, and thus, can be usefully used in manufacturing various microelectronic devices and optoelectronic devices. I can. |