| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate |
2014-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102171265-B1 |
| titleOfInvention |
Patterning method using metal mask, and method for fabricating semiconductor device comprising the same patterning method |
| abstract |
The technical idea of the present invention provides a patterning method using a metal mask capable of easily forming a hole having a high aspect ratio, and a method of manufacturing a semiconductor device including the patterning method. The patterning method includes sequentially forming a lower metal layer and an upper metal layer on an etch target layer; Forming an upper metal mask by patterning the upper metal layer; Forming a lower metal mask by patterning the lower metal layer using the upper metal mask; And patterning the etch target layer by using the upper metal mask. |
| priorityDate |
2014-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |