http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102169835-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2017-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102169835-B1 |
| titleOfInvention | Polishing liquid, chemical mechanical polishing method |
| abstract | An object of the present invention is to provide a polishing liquid capable of providing an object to be polished having excellent in-plane uniformity. In addition, it is to provide a chemical mechanical polishing method using the polishing liquid. The polishing liquid of the present invention is a polishing liquid used for chemical mechanical polishing, and contains abrasive grains, an organic acid, and a water-soluble polymer, and satisfies all of the following formulas (1) to (3). Equation (1): 1.5≤η 100rpm / η 1000rpm ≤20 Equation (2): 1.2≤η 100rpm / η 500rpm ≤10 Equation (3): η 100rpm /η 1000rpm >η 100rpm /η 500rpm In formulas (1) to (3), η 100 rpm is the viscosity of the polishing liquid measured at a rotational speed of 100 rpm by a rotational viscometer at 40%RH and 23°C, and η 500rpm is 40%RH, 23°C. Is the viscosity of the polishing liquid measured at a rotational speed of 500 rpm by a rotational viscometer, and η 1000rpm is the viscosity of the polishing liquid measured at a rotational viscometer at 40%RH and 23°C at a rotational speed of 1000 rpm. |
| priorityDate | 2016-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 130.