abstract |
It provides a thin film transistor panel. A thin film transistor display panel according to an embodiment of the present invention includes a substrate, a gate line positioned on the substrate and including a gate electrode, a semiconductor layer positioned on the substrate, a gate insulating layer positioned between the gate electrode and the semiconductor layer, and A data line positioned on a substrate and crossing the gate line, a data wiring layer including a source electrode connected to the data line and a drain electrode facing the source electrode, a metal silicide layer covering the source electrode and the drain electrode, and the And a metal silicide layer, a protective layer covering the source electrode and the drain electrode. |