http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102160296-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02178 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30 |
| filingDate | 2014-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102160296-B1 |
| titleOfInvention | Multi-layer etching solution composition for formation of metal line |
| abstract | The present invention relates to a multilayer etchant composition for forming a metal wire, and more particularly, phosphoric acid 60 to 70% by weight; 2 to 8% by weight of nitric acid; 5 to 15% by weight of acetic acid; 0.1 to 7% by weight of at least one potassium-based compound selected from the group consisting of K 3 PO 4 , K 2 HPO 4 , KH 2 PO 4 , CH 3 CO 2 K and KNO 3 ; 0.1 to 5% by weight of alkyl (carbon number 1 to 5) tetrazole; And an etchant composition capable of etching a multilayer film made of an aluminum-based metal film and a molybdenum-based metal film with a fine line width by including the remaining amount of water. |
| priorityDate | 2014-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.