http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102157819-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32651 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3447 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2017-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102157819-B1 |
| titleOfInvention | Thermal Optimized Rings |
| abstract | Disclosed herein is a process kit ring for use in a plasma processing system. The process kit ring includes an annular body and one or more hollow inner cavities. The annular body is formed of a plasma resistant material. The annular body has an outer diameter greater than 200 mm. The annular body includes a top surface and a bottom surface. The top surface is configured to face the plasma processing region of the process chamber. The lowermost surface is opposite to the uppermost surface. The lowermost surface is substantially perpendicular to the centerline of the body. The lowermost surface is supported at least partially by the pedestal assembly. One or more hollow inner cavities are formed in the annular body about a center line. One or more hollow inner cavities are arranged circularly within the annular body. |
| priorityDate | 2016-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.