| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-06113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-0683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-0697
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02686
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-105 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-4788
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02686
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 |
| filingDate |
2015-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102154495-B1 |
| titleOfInvention |
Monitoring method and apparatus for control of excimer laser annealing |
| abstract |
A method of evaluating a silicon layer 22 crystallized by dimming with pulses from an excimer laser is disclosed. Crystallization yields periodic features on the crystallized layer that are dependent on the number of pulses the layer is exposed to and the energy density (ED) in the pulse. The area of the layer is dimmed with light 29. Microscopic images of a dimmed area are made from light diffracted from the dimmed area by the periodic feature. The microscopic image includes the corresponding periodic features. ED is determined from a measurement of the contrast of periodic features in the microscope image. |
| priorityDate |
2014-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |