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filingDate 2013-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2020-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102142037-B1
titleOfInvention Ceramic material and sputtering-target member
abstract The ceramics material of the present invention is a ceramics material mainly composed of magnesium, gallium, lithium, and oxygen, and has a crystalline phase of a solid solution in which gallium oxide and lithium oxide are dissolved in magnesium oxide as a main phase. It is preferable that the XRD peak of the (200) plane when the CuKα ray is used is 2θ=42.91° or greater, which is larger than the peak of the cubic crystal of magnesium oxide, and 2θ=42.91° to 43.28°. It is more preferable to appear, more preferably 2θ=42.91° to 43.02°. Moreover, it is preferable that the molar ratio Li/Ga of Li and Ga is 0.80 or more and 1.20 or less in the ceramics material.
priorityDate 2012-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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