abstract |
A technique for producing a new thin film using a biocompatible compound or the like, which was difficult to form a film, in particular, to produce a new thin film having a composition continuously inclined from the surface to the cross-sectional direction of the film, for example, having different structures on the front and back. Provide technology. A step of preparing a solution of a raw material compound, a step of forming a thin film of the solution on the surface of the substrate, and a step of forming an organic polymerized thin film by irradiating plasma or electron beam on one exposed side of the thin film to perform polymerization reaction It is characterized by. |