http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102140719-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-247 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78693 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6675 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate | 2013-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102140719-B1 |
| titleOfInvention | Barrier materials for display devices |
| abstract | Apparatus comprising at least one silicon-containing layer and a metal oxide layer are disclosed herein. Also provided herein is a method for forming one or more silicon-containing layers used, for example, as passivation layers in display devices. In one particular aspect, the device includes a transparent metal oxide layer, a silicon oxide layer, and a silicon nitride layer. In this or other aspects, the device is deposited at a temperature of 350°C or lower. The silicon-containing layer described herein comprises one or more of the following properties: density of about 1.9 g/cm 3 or greater; A hydrogen content of about 4x10 22 cm -3 or less; And a transmittance of about 90% or more at 400 to 700 nanometers, as measured by a UV-visible spectrometer. |
| priorityDate | 2012-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 103.