| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a08981f36210b915a7907fdd2cc54c80 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-604 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28B7-346
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B28B7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2019-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ac01467751a0789d088a6b6240537be |
| publicationDate |
2020-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102132251-B1 |
| titleOfInvention |
Method of manufacturing a cylinder or a ring type boron carbaide sintered body and method of manufacturing a edge ring for plasma device using thereof |
| abstract |
The present invention, by forming a boron carbide sintered body in the form of a cylinder or ring, among the components of the covering assembly in the plasma device used in the plasma etching process, in particular for the production of the edge, to smoothly form a vacuum atmosphere, pores inside the product It provides a method for manufacturing a sintered compact of boron carbide in the form of a cylinder or a ring and a method of manufacturing an edge ring for a plasma device using the same, which effectively reduces the defect rate and improves the economic efficiency and efficiency of the process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102488114-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102310046-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210019761-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102419521-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102419533-B1 |
| priorityDate |
2019-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |