http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102130849-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate | 2013-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102130849-B1 |
| titleOfInvention | Positive-type photoresist composition, photoresist laminate, method for producing photoresist pattern, and method for producing connecting terminal |
| abstract | (Task) When forming a photoresist pattern for forming a connection terminal such as a bump or a metal post using a positive photoresist composition, the bottom (surface side of the support body) is wider than the width of the normal (surface side of the photoresist layer). Providing a positive photoresist composition capable of forming a photoresist pattern having a large non-resist portion, a photoresist laminate using such a composition, a method of manufacturing a photoresist pattern, and a method of manufacturing a connection terminal . (Solution) A positive type containing an acid generator (A) that generates an acid upon irradiation with actinic rays or radiation and a resin (B) and an organic solvent (S) whose solubility in alkali is increased by the action of an acid. To the photoresist composition, an alkali metal salt (C) is added. |
| priorityDate | 2012-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 435.