http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102120750-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-0678 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-0486 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-084 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-08 |
| filingDate | 2018-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102120750-B1 |
| titleOfInvention | Vertical Center Aligner for High Pressure Gas |
| abstract | The present invention is installed in a cabinet (cabinet) to supply gas from the FAB process (Fabrication Process) equipment of the semiconductor to align the vertical center of the high pressure gas cylinder so that the center of the valve connector and the connector holder is automatically matched (align) ) Is related to the vertical center alignment device of the high pressure gas cylinder. Even if the concentricity difference of each high pressure gas cylinder occurs because the concentricity of the high pressure gas cylinder is not precise, the vertical center of the high pressure gas cylinder is automatically aligned to the vertical center of the auto coupler unit. I made it possible. To this end, according to the present invention, the auto coupler unit 400 and the auto coupler unit 400 are installed to be movable in the X-Y axis direction according to the concentricity of the high-pressure gas cylinder 300 in the fixture 200 installed in the cabinet 100. The centering guide 420 provided with a ring-shaped guide hole 421 to be centered on the vertical center of the high pressure gas cylinder 300 by being suspended by a plurality of support rods 410 on the 400), and an upper portion of the high pressure gas cylinder 300 It is fixed to the guide hole 421 of the centering guide 420, while the vertical center of the high pressure gas cylinder 300 is composed of a safety cap nut ring 340 that matches the vertical center of the auto coupler unit 400, the high pressure gas cylinder The safety cap nut ring 340 of 300 is connected to the inner circumferential surface of the guide hole 421, and is characterized in that centering is performed. |
| priorityDate | 2017-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.