http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102120747-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-056 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2260-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0153 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2260-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-054 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0142 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-0421 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-0478 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2227-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2221-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2223-0123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-0104 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2223-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-084 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-08 |
| filingDate | 2018-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102120747-B1 |
| titleOfInvention | Automatic replacement method of high-pressure gas tank |
| abstract | The present invention relates to a method for automatically replacing a high-pressure gas cylinder, and when a high-pressure gas cylinder is loaded on a lift of a cabinet to supply gas from a semiconductor FAB process process facility to a wafer production line, the high-pressure gas cylinder is replaced. At this point in time, the high-pressure gas cylinder was removed from the connector holder, and then a new high-pressure gas cylinder was connected to the connector holder to enable automation by replacing the high-pressure gas cylinder. To this end, the present invention loads the first and second high-pressure gas cylinders 201 and 202 to a pair of lifts 400 installed to be able to rise and fall in the cabinet 100 to discharge gas from the first high-pressure gas cylinder 201. The first step of supplying to the gas supply line and waiting for the valve connection port 211 of the second high pressure gas cylinder 202 to be connected to the connector holder 310 and while supplying gas from the first high pressure gas cylinder 201 When the replacement time of the first high-pressure gas cylinder 201 is detected by the control unit 500, the flow passage is switched to stop supply of gas from the first high-pressure gas cylinder 201, and the second high-pressure gas cylinder 202 is supplied with gas. The second step, the third step of automatically locking the valve handle 213 of the first high pressure gas cylinder 201, and the end after releasing the connection state of the first high pressure gas cylinder 201 from the connector holder 310 The fourth step of locking the valve connector 211 with the cap 212, the fifth step of lowering the die 410 on which the first high-pressure gas cylinder 201 is placed, to the bottom dead center, and use from the connector holder 310 A sixth step of automatically removing the gasket after the first step, and a seventh step of releasing the clamping state of the first high-pressure gas cylinder 201 mounted on the die 410, and opening the door of the cabinet 100 to open the die 410 ) Removes the first high pressure gas cylinder 201 and then places the third high pressure gas cylinder 203 on the die 410 and closes the door, and the third high pressure gas cylinder 203 mounted on the die 410 is clamped. The ninth step, the tenth step of automatically inserting a new gasket into the connector holder 310, and the third high-pressure gas cylinder 203, the lift 400 is loaded to the top dead center, and then the valve connector ( The 11th step of aligning the center of the 211) and the center of the connector holder 310, and removing the end cap 212 from the third high pressure gas cylinder 203, and then attaching the valve connector 211 to the connector holder 310 A twelfth step of connecting, and a first waiting to open the valve handle 213 of the third high-pressure gas cylinder 203 Characterized in that the three steps are made sequentially. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220099018-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220099207-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11322346-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102474084-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102474062-B1 |
| priorityDate | 2017-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548998 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23969 |
Total number of triples: 43.