http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102119685-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6704 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 2018-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102119685-B1 |
| titleOfInvention | substrate processing apparatus |
| abstract | The present invention relates to a substrate processing apparatus, the substrate processing comprising a cleaning jig having a central portion placed on a support plate provided in a liquid processing unit and a plurality of guide portions provided in an edge region of the central portion to scatter the processing liquid provided to the central portion Provide a device. |
| priorityDate | 2018-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.