http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102112737-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2017-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102112737-B1 |
| titleOfInvention | Method of producimg layer structure, and method of forming patterns |
| abstract | According to one embodiment, applying a first composition on a substrate having a plurality of patterns and then curing to form a first organic layer (S1); Removing a portion of the first organic layer by applying a liquid material to the first organic layer (S2); And after applying a second composition on the first organic layer is partially removed and cured to form a second organic layer (S3), the first composition and the second composition are each independently represented by the formula (1) It provides a method for producing a membrane structure comprising a polymer comprising a structural unit represented, a monomer having a molecular weight of 1,500 or less, and a ring group in which at least three substituted or unsubstituted benzene rings are fused, and a solvent. |
| priorityDate | 2017-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 350.