http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102112535-B1
Outgoing Links
Predicate | Object |
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classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-10 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-12 |
filingDate | 2014-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2020-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2020-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-102112535-B1 |
titleOfInvention | Dressing device for polishing-use foamed urethane pad |
abstract | The present invention is a dressing device for dressing abrasive foam urethane pads by pressing the diamond abrasive grains against sliding abrasive foam urethane pads. And, the plurality of diamond abrasive grains is composed of a high-frequency diamond abrasive grain having a # 170 or higher number and a low-frequency diamond abrasive grain having a # 140 or lower number, and is in contact with each foamed urethane pad of the plurality of diamond abrasive grains. It is a dressing device characterized in that it is supported on a pedestal so that the height position of the dress surface is on the same plane. In this way, the dressing device can shorten the dressing time, lengthen the dress interval and suppress the decrease in productivity by roughening the surface sufficiently with one dressing without clogging the foaming hole of the foamed urethane pad. Is provided. |
priorityDate | 2013-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 200.