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filingDate 2014-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2020-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102111825-B1
titleOfInvention Silicon substrate having ferroelectric film attached thereto
abstract The residual stress in the PZT-based ferroelectric film 12 formed by the sol-gel method on the substrate body 11 is -14 kPa to -31 kPa, and the ferroelectric film 12 is crystal-oriented in the (100) plane.
priorityDate 2013-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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