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filingDate 2017-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2020-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102105386-B1
titleOfInvention Bulk-acoustic wave resonator and method for manufacturing the same
abstract The substrate protective layer includes a substrate formed on the upper surface, a membrane layer forming a cavity together with the substrate, and a resonant portion formed on the membrane layer, wherein the membrane layer includes a first layer and the same material as the first layer Disclosed is a volume acoustic resonator comprising a second layer having a greater density than the first layer.
priorityDate 2016-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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