http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102105386-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02543 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02614 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02 |
filingDate | 2017-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2020-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2020-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-102105386-B1 |
titleOfInvention | Bulk-acoustic wave resonator and method for manufacturing the same |
abstract | The substrate protective layer includes a substrate formed on the upper surface, a membrane layer forming a cavity together with the substrate, and a resonant portion formed on the membrane layer, wherein the membrane layer includes a first layer and the same material as the first layer Disclosed is a volume acoustic resonator comprising a second layer having a greater density than the first layer. |
priorityDate | 2016-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.