http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102104807-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate | 2016-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102104807-B1 |
| titleOfInvention | Pattern formation method, manufacturing method of electronic device, and resist composition |
| abstract | A method for forming a pattern with high sensitivity and high resolution in forming a very fine pattern, a method for manufacturing an electronic device, and a resist composition are provided. The pattern formation method is represented by the general formula (1) in the specification (A), contains a repeating unit having a ClogP value of 2.2 or less, and a resin whose solubility in a developer containing an organic solvent decreases due to the action of an acid, and ( B) a step of forming a film using an actinic ray-sensitive or radiation-sensitive resin composition containing a compound which generates an acid upon irradiation with actinic rays or radiation and (C) a solvent (1), the actinic ray or There is a step (2) of exposing using radiation, and a step (3) of developing the film exposed in the step (2) using a developer containing an organic solvent to form a negative pattern. |
| priorityDate | 2015-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 638.