| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-131 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-4807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-87 |
| filingDate |
2014-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102098926-B1 |
| titleOfInvention |
Rare-earth oxide based erosion resistant coatings for semiconductor application |
| abstract |
The article includes a body coated with a ceramic coating. The ceramic coating comprises Y 2 O 3 in a range from about 45 mol% to about 99 mol%, ZrO 2 in a range from about 0 mol% to about 55 mol%, and Al 2 O 3 in a range from about 0 mol% to about 10 mol%. It can contain. The ceramic coating alternatively includes Y 2 O 3 in the range of about 30 mol% to about 60 mol%, ZrO 2 in the range of about 0 mol% to about 20 mol%, and Al in the range of about 30 mol% to about 60 mol%. 2 O 3 . |
| priorityDate |
2013-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |