http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102097503-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34 |
| filingDate | 2013-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102097503-B1 |
| titleOfInvention | Cleaner and method for fabricating semiconductor device using it |
| abstract | As an adhesive for attaching a semiconductor substrate and a carrier, a cleaning solution for removing an adhesive containing a polymer containing siloxane (Siloxane) is provided. The cleaning solution includes a first oxidizing agent represented by the following chemical formula: (Formula) In the above formula, A is one of hydroxyl group, halogen, alkyl group and aryl group. |
| priorityDate | 2013-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.