http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102097171-B1

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filingDate 2013-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2020-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102097171-B1
titleOfInvention Semiconductor device
abstract The present invention provides a transistor in which short-channel effects are not substantially generated even when the channel length is small, and switching characteristics are obtained. In addition, a semiconductor device having high integration using the transistor is provided. It is a transistor using an oxide semiconductor film in which a short-channel effect generated in a transistor using silicon does not substantially occur, and the channel length is 5 nm or more and less than 60 nm, and the channel width is 5 nm or more and less than 200 nm. At this time, the channel width is made 0.5 to 10 times the length of the channel.
priorityDate 2012-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 50.