http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102094296-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3418 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-424 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3218 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-9661 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-515 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62222 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-63452 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-634 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-515 |
| filingDate | 2018-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102094296-B1 |
| titleOfInvention | Composition of Ceramic Paste with Black Color for Electrostatic Chuck and Electrostatic Chuck using thereof |
| abstract | The present invention relates to a black ceramic paste composition for an electrostatic chuck and an electrostatic chuck using the same, an epoxy resin 25 to 45% by weight, aluminum hydroxide (Al (OH) 3 ) 20 to 40% by weight, silicon dioxide (SiO 2 ) 0.1 to 5 It is characterized by containing weight%, carbon black 0.1-5% by weight and additives 5-25% by weight, and the upper insulating layer of the conventional electrostatic chuck is white or ivory color, so that the electrode pattern of the electrostatic chuck is projected onto the substrate. In order to improve the problem affecting the inspection of defects, by coloring the insulating layer, there is an effect that can easily detect defective products during pattern inspection. |
| priorityDate | 2018-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.