http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102094188-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-1804 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D25-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-442 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-442 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2016-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102094188-B1 |
| titleOfInvention | Alkoxysilylamine compounds and applications thereof |
| abstract | Alkoxysilylamine precursors having the following formula A or B are described herein: In the above formula, R 1 and R 4 are each independently a linear or branched C 1 to C 10 alkyl group, C 3 to C 12 alkenyl group, C 3 to C 12 alkynyl group, C 4 to C 10 cyclic alkyl Group, and C 6 to C 10 aryl group; R 2 , R 3 , R 5 , and R 6 are independently hydrogen, a linear or branched C 1 to C 10 alkyl group, C 2 to C 12 alkenyl group, C 2 to C 12 alkynyl group, C 4 to C 10 cyclic alkyl groups, C 6 to C 10 aryl groups, and linear or branched C 1 to C 10 alkoxy groups. Also described herein are deposition methods using one or more precursors having Formulas A and / or B described herein. |
| priorityDate | 2012-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 155.