| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-10 |
| filingDate |
2017-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102090243-B1 |
| titleOfInvention |
Hydrogen peroxide stabilizer and etching composition containing them |
| abstract |
The present invention provides a peroxide stabilizer and an etching composition comprising the same, and the etching composition of the present invention includes the peroxide stabilizer of the present invention to prevent decomposition of hydrogen peroxide during the etching process and to control the overetching of the metal interface, thereby providing excellent etching. It has characteristics. |
| priorityDate |
2016-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |