http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102088734-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2448 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-185 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-222 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N35-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8803 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2251 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N35-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88 |
| filingDate | 2015-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102088734-B1 |
| titleOfInvention | Inspection apparatus |
| abstract | (Task) An inspection device capable of inspecting the condition of the irregularities on the surface of the inspection object with high contrast is provided. (Solution means) The inspection apparatus includes beam generating means for generating charged particles or electromagnetic waves as a beam, a primary optical system for irradiating a beam to an inspection object, and a secondary optical system for detecting secondary charged particles generated from an inspection object, And an image processing system that forms an image based on the detected secondary charged particles. The irradiation energy of the beam is set in an energy region in which mirror electrons are emitted as secondary charged particles from the inspection object by irradiation of the beam. The secondary optical system includes a camera for detecting secondary charged particles, a new mercury aperture that can adjust its position along the optical axis direction, and a secondary charged particle that has passed through the new mercury aperture. ). In the image processing system, an image is formed under an aperture imaging condition in which imaging is performed with the position of the new mercury aperture as the water surface. |
| priorityDate | 2014-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.