| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2063-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C39-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C39-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L63-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C39-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L63-00 |
| filingDate |
2018-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102088512-B1 |
| titleOfInvention |
Cmp retainer ring, method of manufacturing the same, and cmp apparatus including the retainer ring |
| abstract |
A retainer ring according to an embodiment of the present invention includes: a retainer ring used in a CMP device, coupled to a lower end of a carrier of the CMP device, a frame layer comprising a thermosetting resin; A synthetic resin layer disposed on the bottom of the frame layer, the lower portion contacting the polishing pad and retaining the wafer; And a primer resin layer disposed between the synthetic resin layer and the frame layer to bond the synthetic resin layer and the frame layer. |
| priorityDate |
2018-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |