http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102075960-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D211-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0388 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D211-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D211-46 |
| filingDate | 2013-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102075960-B1 |
| titleOfInvention | Photoresist composition, method for forming resist pattern, acid diffusion control agent and compound |
| abstract | The present invention is a photoresist composition containing a polymer having an acid dissociable group, a radiation sensitive acid generator, and an acid diffusion control agent, wherein the acid diffusion control agent comprises a compound represented by the following general formula (1). In the following general formula (1), R 1 , R 2 and R 3 are each independently a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms. A is at least one group selected from the group consisting of a hydrogen atom, a linear hydrocarbon group having 1 to 30 carbon atoms and an alicyclic hydrocarbon group having 3 to 30 carbon atoms, and -O-, -CO-, -COO-, and -SO 2 O -, -NRSO 2 -, -NRSO 2 O- and at least one member selected from the group consisting of -NRCO- group, by combining the n number of the nitrogen atom to which site binding to the carbonyl group in formula (1) It is an n-valent group which consists of 120 or more of a sum total of atomic weight. n is an integer of 1-4. |
| priorityDate | 2012-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 436.