| abstract |
Provided is a technique capable of reducing the occupied area of the device. It is provided with the storage chamber provided with the loading shelf which mounts the storage container which accommodates a board | substrate, the conveyance mechanism which is provided in the ceiling part of a storage chamber, grips and conveys the upper part of a storage container, and the port which carries in and out a storage container with respect to a storage chamber is provided. The port has an adjustment plate fixed on the base, a stage on which the storage container is stacked, and a horizontal drive mechanism provided at an upper portion of the adjustment plate, connected to the rear surface of the stage via a connecting member, and horizontally moving the stage. The horizontal drive mechanism is constituted by a pair of guide portions whose ends are connected to each other and a first drive portion which is provided between the guide portions and presses the connecting portions of the guide portions. |