http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102071663-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-186 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B32-186 |
| filingDate | 2018-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102071663-B1 |
| titleOfInvention | Method of manufacturing graphene directly on a substrate without transfer process |
| abstract | One embodiment of the present invention relates to a graphene manufacturing method. More specifically, forming a catalyst layer on a substrate, using a chemical vapor deposition method to inject a carbon compound on the catalyst layer while simultaneously forming a graphene layer on the catalyst layer and between the catalyst layer and the substrate and the catalyst layer It includes the step of removing on the substrate, the step of forming the graphene layer is characterized in that the temperature is 150 ℃ to 450 ℃ provides a process for synthesizing at a low temperature without a transfer process on the substrate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022215891-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210119264-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102438664-B1 |
| priorityDate | 2018-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 200.