http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102068956-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-124 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4908 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78693 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B44-00 |
| filingDate | 2012-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102068956-B1 |
| titleOfInvention | Thin film transistor, thin film transistor array substrate, and method of fabricating the same |
| abstract | The present invention includes the steps of continuously depositing a second metal layer made of copper and a first metal layer on a substrate; Performing a plasma process to form a copper nitride layer on the second metal layer; Patterning the copper nitride layer, the second metal layer, and the first metal layer to form a gate electrode; Forming a first gate insulating film made of silicon nitride on the substrate including the gate electrode; Forming a second gate insulating film made of silicon oxide on the first gate insulating film; Forming a semiconductor layer of an oxide semiconductor material on the second gate insulating film; It provides a method of manufacturing a thin film transistor comprising forming a source electrode and a drain electrode spaced apart from each other on the semiconductor layer. |
| priorityDate | 2012-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.