http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102058679-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate | 2016-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102058679-B1 |
| titleOfInvention | Etching composition for copper/molybdenum or copper/molybdenum alloy multilayers |
| abstract | The present invention relates to an etchant composition of a copper / molybdenum or copper / molybdenum alloy film, and provides a copper / molybdenum or copper / molybdenum alloy film etchant composition including a compound having an alcohol group and an amine group as an etchant. The etching liquid composition according to the present invention is a TFT-LCD display because the etching characteristics such as tapered angle, CDOS, and etching straightness can be maintained even when the metal ion content in the etching liquid is repeated by repeating the etching process. It can be usefully used for the production of OLED electrodes. |
| priorityDate | 2013-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 83.