http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102051189-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D201-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D201-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-00 |
| filingDate | 2017-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102051189-B1 |
| titleOfInvention | Composition for forming organic film |
| abstract | An object of the present invention is to dry-etch by using a peeling solution that does not damage an organic resist underlayer film required in a semiconductor device substrate or a patterning step, for example, an aqueous hydrogen peroxide-containing ammonia solution called SC1 commonly used in semiconductor manufacturing processes. It is to provide an organic film-forming composition capable of forming an organic film which can be easily wet-removed together with the modified silicon powder residue. As a solution of the present invention, as the composition for forming an organic film, the composition for forming an organic film includes a polymer compound and an organic solvent having any one or more of repeating units represented by the following general formulas (1) to (4). In the organic solvent, a composition for forming an organic film is provided in which at least one total selected from propylene glycol esters, ketones, and lactones accounts for more than 30 wt% of the total organic solvent. |
| priorityDate | 2017-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 321.