http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102040716-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8febfaf1ba2cd4bb90e85763804adf4a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2018-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_912253e1faa3e678f9e31ee3b26228d6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e75ab9aa4bf70dfb43dafc707fed4c4 |
| publicationDate | 2019-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102040716-B1 |
| titleOfInvention | Method for automatically replacing a gas barrel |
| abstract | The present invention relates to an automatic gas cylinder replacement method for automatically replacing gas cylinders loaded and unloaded into a cabinet to supply gas to a wafer production line from a FAB process process facility of a semiconductor. A track is installed in front of a plurality of cabinets installed in-line, and a transfer (called "RGV: Rail Guided Vehicles") for transporting a gas cylinder is installed on the track so as to be movable. To automatically load and unload gas cylinders into the cabinet. To this end, according to the present invention, when the replacement timing of the gas cylinder is detected from any one of the cabinets 20 installed inline in a plurality of rows, the transfer 40 corresponds to the track 50 installed in front of the cabinet 20. Opening the door 21 of the cabinet in which the gas cylinder 30 to be replaced is installed while moving to the cabinet, and the gripper 42 clamps the gas cylinder 30 to be replaced in the cabinet 20. 40, the door 21 is closed, and the safety cap 31 is fastened to the gas cylinder 30, and after the gas cylinder to be replaced is loaded on the transfer 40, the transfer is unloaded along the track 50. (61a) and then the gripper 42 unloads the gas cylinder 30 to the unloading portion 61 and releases the clamping from the gas cylinder 30, and transfers the transfer 40 to the track 50. Accordingly moving to the loading position 60a with the new gas cylinder And the gripper 42 clamps the new gas cylinder 30 in the loading unit 60 to the transfer 40 by the transfer 40, and the transfer 40 carrying the new gas cylinder 30 is tracked. Moving along (50) and stopping in front of the empty cabinet, remove safety cap (31) from gas cylinder (30), open door (21), and gripper (42) moves gas cylinder (30) of cabinet (20). Closing the door 21 of the cabinet 20 after positioning therein and releasing the clamping, and moving the transfer 40 along the track 50 to the loading position 60a or the unloading position 61a. Characterized in that it comprises the step of moving to wait. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230037175-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113669622-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11322346-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102579975-B1 |
| priorityDate | 2018-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.