Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-845 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1211 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823468 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0924 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823821 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41791 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823431 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7855 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7846 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7843 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
filingDate |
2017-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2019-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2019-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-102026540-B1 |
titleOfInvention |
Self-aligned structure for semiconductor devices |
abstract |
FIELD The present disclosure relates to semiconductor devices and manufacturing methods, and more particularly, to semiconductor devices having self-aligned isolation structures. The present disclosure provides self aligned spacer fins that can be formed by depositing a dielectric material in an opening formed in the spacer layer or by replacing a portion of the fin with a dielectric material. Self-aligned isolation pins may be separated from each other by the critical dimension of the photolithography process used. The separation between self-aligned isolation pins or between self-aligned isolation pins and active pins may be approximately equal to or greater than the separation between active pins. |
priorityDate |
2017-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |