| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1811
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0275
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2013-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2019-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102025782-B1 |
| titleOfInvention |
Resist pattern forming method and photoresist composition |
| abstract |
The present invention has a process of forming a resist film from a photoresist composition, a process of exposing the resist film, and a process of developing the exposed resist film, wherein the photoresist composition generates an acidic asset by the exposure of exposure light. , And a resist pattern forming method comprising a polymer having a structural unit comprising a group (a) which forms a cationic group together with a proton and having substantially no structural unit comprising an acid dissociable group. It is preferable that the said group (a) contains at least 1 sort (s) chosen from the group which consists of a nitrogen atom which has a lone pair and a phosphorus atom which has a lone pair. |
| priorityDate |
2012-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |