http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102017957-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-12746 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-645 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N22-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-6489 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N22-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 |
| filingDate | 2017-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102017957-B1 |
| titleOfInvention | Calibration curve determination method, carbon concentration measurement method, and silicon wafer-manufacturing method |
| abstract | It is possible to measure the carbon concentration with a small number of calibration curves for silicon wafers containing oxygen at high concentrations. The method for creating a calibration curve includes a step (S11) of preparing a group of wafers each including silicon wafers having the same oxygen concentration and different carbon concentrations, and having different oxygen concentrations, and applying the electron beam to the plurality of regions of each silicon wafer at different irradiation doses. The step (S12) of irradiation, the step (S13) of obtaining the ratio of the 1st luminous intensity derived from silicon and the 2nd luminous intensity derived from carbon by PL method with respect to each area | region, The data obtained here is irradiated and oxygen concentration Is the same in each case, and at least one of the irradiation amount and the oxygen concentration is classified into a plurality of data sets that are different from each other, and a first calibration curve is created for each data set (S14), a pair having the same irradiation amount and different oxygen concentrations. Step (S15) of selecting a first calibration curve of; and calculating the difference in inclination in the case of drawing them on both logarithmic graphs, and the selected first A step (S16) of creating a second calibration curve using all of the data contained in the data set used to create the calibration curve is included. |
| priorityDate | 2017-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.