http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102009250-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3213 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13439 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1362 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate | 2011-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102009250-B1 |
| titleOfInvention | Method for manufacturing display device and an etching solution composition for metal layer containing copper/metal oxide layer |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a display device and an etchant composition of a copper-based metal film / metal oxide film, and more particularly, to simultaneously etching a data metal layer including a copper-based metal film and an oxide semiconductor layer including a metal oxide film. By patterning using an etchant composition to form a semiconductor pattern, a source pattern including a data line, a source electrode and a drain electrode, thereby improving the productivity of the thin film transistor and the display device and the reliability of the manufacturing process of the display device. It relates to a manufacturing method and an etching liquid composition of the copper-based metal film / metal oxide film used therein. |
| priorityDate | 2011-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 193.