http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102008882-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-26 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-60 |
| filingDate | 2013-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102008882-B1 |
| titleOfInvention | Cleaning solution composition for dicing a wafer |
| abstract | The present invention relates to a cleaning composition for wafer dicing, and more particularly, to a polymer compound comprising at least one selected from the group consisting of an EO-PO copolymer compound represented by the formula (1), an acrylic acid polymer, and a salt thereof, isothia By including a zolinone compound and a solvent, the weight-average molecular weight of the EO-PO copolymer compound satisfies 1,000 to 10,000, thereby significantly reducing the generation of bubbles to prevent defects of the detergent spraying device during the dicing process, A cleaning composition for wafer dicing which suppresses formation and pad corrosion and has excellent cleaning ability. |
| priorityDate | 2013-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.